sales@sequoia-vacuum.com

4841 Davenport Place, Fremont, CA 94538

Sample manipulation, heat/cool, voltage biasing are common in surface science metrology and analysis.  Stages are used to attain motion and manipulate of sample inside a vacuum chamber.

Stage configuration:

Rotational, Z-axis, XY and XYZ configurations

Tilt or Gimbal assembly

Please send inquiry of motorized stages

Specification
Bake temperature 200°  C
Vacuum range 1×10-9 Torr
Op. temperature – 20 C to 150 C
Mat’l exposed to vac. SST

Stage: VFS

Product Series
Rotation stage VFS-R
Tilt stage VFS-T
Gimbal stage VFS-G
Z-axis stage VFS-Z
Z-axis stage, Compact VFS-ZC
XY-axis stage VFS-XY
XYZ-axis stage VFS-XYZ

Part number system
Rotation stage: Model# – Flange – Port ID
Linear Stage: Model# – Flange- Stroke

Rotational Stage, VFS-R

Constructed with worm gear drive which offer substantial mechanical advantage, allowing easy operation under heavy load.  Two spring energized PTFE face seals are at the heart of the rotatable stage’s sealing mechanism.

Differentially pump between seals and bakeable as high as 200 C.  Suitable for UHV environment.

Flange Port ID “B” “C” “T” “H” Max. load (lb)
CF4.50 2.5 5.34 3.82 2.02 6.77 375
CF6.0 4 6.21 4.7 2.02 6.77 500

Specification
Full rotation: 360° Resolution (dial)
Seal: Dual PTFE face seal Repeatability +/- 0.1
Expose to vacuum Stainless Steel & Teflon Pump port KF16
Vacuum range 1×10-9 Torr Max. load see table

Tilt Stage, VFS-T

Flange Bellow ID Angular  Angle “A” max. load (lb)
CF1.33 0.5 10 20 1 15
CF2.75 1.39 2 4 1.67 30
CF2.75 1.39 10 20 1.67 30

Specification
Seal: Welded bellows Resolution:
Bake temperature 200° C 1″ motion
Op. temperature – 20 C to 150 C 2″ motion 0.2°
Vacuum range 1×10-9 Torr Max. load see table

Gimbal Stage, VFS-G

Product Series
No bellow, No micrometer VFG — CF275
No bellow, w/ micrometer VFG — CF275 — NBM
w/ bellow, No micrometer VFG — CF275 — BNM
w/ bellow, w/ micrometer VFG — CF275 — BM

Flange “B” “A” Adjustment Load (lb) Micrometer
CF2.75 3 4.5 thum screw 20 0.01 mm
Specifications
Position lock Thum Screw Tilt Resolution: 0.1 mm
Bake temperature 200° C (micrometer removed) Tilt Motion 30°
Max. load 20 lbs

Z-axis Stage, VFS-Z/VFS-ZC

Compact Series features a smaller outline and simplified designs. Rugged and cost-effective. Standard Series features a worm drive gearbox for higher load and accuracy.

Compact Series, VFS-ZC Standard Series, VFS-Z
Flange Stroke (in) Height (in) | Stroke (in) Height (in) max. load
 CF2.75 1 2.2-8.7 | 2 4.7-8.3 22  (lb)
2 2.2-8.7 | 4 4.7-10.3 22
4 2.95-11.3 | 6 4.7-12.3 22
| 8 5.8-15.4 22
CF4.50 1 2.2-8.7 | 4 4.8-10.4 22
2 2.2-8.7 | 8 5.8-15.4 22
4 2.95-11.4 | 12 6.9-20.5 22

XY Stage, VFS-XY

All material exposed to vacuum is Stainless Steel. Available in digital or mechanical micrometer. See pictures below

Specifications
Seal Welded bellows Micrometer:  +/- 12.5 mm (0.5″)
Resolution: 0.002 mm (.0001″)
Flange CF275, tapped 1/4-28
Material exposed to vac. Stainless Steel Max. load 50 lbs

XYZ Stage, VFS-XYZ


Flange Stroke (in) Height (in) “A”
CF2.75 2 6.75 9.25
4 6.75 11.25
6 7.5 14
8 8.4 16.8
CF4.5 4 8.4 13.5
8 8.4 17.5
10 9.4 22.5
Specifications
Seal Welded bellows Micrometer:  +/- 12.5 mm (0.5″)
Bake temperature 200° C  (micrometer removed) Resolution: 0.002 mm (.0001″)
Vacuum range 1×10-10 Torr Flange CF275, tapped 1/4-28
Material exposed to vac. Stainless Steel