Sample manipulation, heat/cool, voltage biasing are common in surface science metrology and analysis. Stages are used to attain motion and manipulate of sample inside a vacuum chamber.
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| Stage configuration:
Rotational, Z-axis, XY and XYZ configurations Tilt or Gimbal assembly Please send inquiry of motorized stages |
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| Specification | |||
| Bake temperature | 200° C | ||
| Vacuum range | 1×10-9 Torr | ||
| Op. temperature | – 20 C to 150 C | ||
| Mat’l exposed to vac. | SST | ||
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Stage: VFS
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| Product Series | |||
| Rotation stage | VFS-R | ||
| Tilt stage | VFS-T | ||
| Gimbal stage | VFS-G | ||
| Z-axis stage | VFS-Z | ||
| Z-axis stage, Compact | VFS-ZC | ||
| XY-axis stage | VFS-XY | ||
| XYZ-axis stage | VFS-XYZ | ||
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Part number system
Rotation stage: Model# – Flange – Port ID
Linear Stage: Model# – Flange- Stroke
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Rotational Stage, VFS-R
Constructed with worm gear drive which offer substantial mechanical advantage, allowing easy operation under heavy load. Two spring energized PTFE face seals are at the heart of the rotatable stage’s sealing mechanism.
Differentially pump between seals and bakeable as high as 200 C. Suitable for UHV environment.
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| Flange | Port ID | “B” | “C” | “T” | “H” | Max. load (lb) |
| CF4.50 | 2.5 | 5.34 | 3.82 | 2.02 | 6.77 | 375 |
| CF6.0 | 4 | 6.21 | 4.7 | 2.02 | 6.77 | 500 |
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| Specification | |||
| Full rotation: | 360° | Resolution (dial) | 1° |
| Seal: | Dual PTFE face seal | Repeatability | +/- 0.1 |
| Expose to vacuum | Stainless Steel & Teflon | Pump port | KF16 |
| Vacuum range | 1×10-9 Torr | Max. load | see table |
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Tilt Stage, VFS-T
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| Flange | Bellow ID | Angular | Angle | “A” | max. load (lb) |
| CF1.33 | 0.5 | 10 | 20 | 1 | 15 |
| CF2.75 | 1.39 | 2 | 4 | 1.67 | 30 |
| CF2.75 | 1.39 | 10 | 20 | 1.67 | 30 |
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| Specification | |||
| Seal: | Welded bellows | Resolution: | |
| Bake temperature | 200° C | 1″ motion | 1° |
| Op. temperature | – 20 C to 150 C | 2″ motion | 0.2° |
| Vacuum range | 1×10-9 Torr | Max. load | see table |
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Gimbal Stage, VFS-G
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| Product Series | |||
| No bellow, No micrometer | VFG — CF275 | ||
| No bellow, w/ micrometer | VFG — CF275 — NBM | ||
| w/ bellow, No micrometer | VFG — CF275 — BNM | ||
| w/ bellow, w/ micrometer | VFG — CF275 — BM | ||
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| Flange | “B” | “A” | Adjustment | Load (lb) | Micrometer |
| CF2.75 | 3 | 4.5 | thum screw | 20 | 0.01 mm |
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| Specifications | |||
| Position lock | Thum Screw | Tilt Resolution: | 0.1 mm |
| Bake temperature | 200° C (micrometer removed) | Tilt Motion | 30° |
| Max. load | 20 lbs | ||
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Z-axis Stage, VFS-Z/VFS-ZC
Compact Series features a smaller outline and simplified designs. Rugged and cost-effective. Standard Series features a worm drive gearbox for higher load and accuracy.
| Compact Series, VFS-ZC | Standard Series, VFS-Z | |||||
| Flange | Stroke (in) | Height (in) | | | Stroke (in) | Height (in) | max. load |
| CF2.75 | 1 | 2.2-8.7 | | | 2 | 4.7-8.3 | 22 (lb) |
| 2 | 2.2-8.7 | | | 4 | 4.7-10.3 | 22 | |
| 4 | 2.95-11.3 | | | 6 | 4.7-12.3 | 22 | |
| | | 8 | 5.8-15.4 | 22 | |||
| CF4.50 | 1 | 2.2-8.7 | | | 4 | 4.8-10.4 | 22 |
| 2 | 2.2-8.7 | | | 8 | 5.8-15.4 | 22 | |
| 4 | 2.95-11.4 | | | 12 | 6.9-20.5 | 22 | |
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XY Stage, VFS-XY
All material exposed to vacuum is Stainless Steel. Available in digital or mechanical micrometer. See pictures below
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| Specifications | |||
| Seal | Welded bellows | Micrometer: | +/- 12.5 mm (0.5″) |
| Resolution: | 0.002 mm (.0001″) | ||
| Flange | CF275, tapped 1/4-28 | ||
| Material exposed to vac. | Stainless Steel | Max. load | 50 lbs |
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XYZ Stage, VFS-XYZ
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| Flange | Stroke (in) | Height (in) | “A” |
| CF2.75 | 2 | 6.75 | 9.25 |
| 4 | 6.75 | 11.25 | |
| 6 | 7.5 | 14 | |
| 8 | 8.4 | 16.8 | |
| CF4.5 | 4 | 8.4 | 13.5 |
| 8 | 8.4 | 17.5 | |
| 10 | 9.4 | 22.5 |
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| Specifications | |||
| Seal | Welded bellows | Micrometer: | +/- 12.5 mm (0.5″) |
| Bake temperature | 200° C (micrometer removed) | Resolution: | 0.002 mm (.0001″) |
| Vacuum range | 1×10-10 Torr | Flange | CF275, tapped 1/4-28 |
| Material exposed to vac. | Stainless Steel | ||
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