Complete line from mini research source to large industrial source. Also available are power supply, controller and accessories. Compact and modular design with integrated water cooling
Specialized in the following:
| Optical | SiO2, TiO2, HFO2, other dielectrics | < 5×10^4 Torr |
| Magnetic | Fe, Ni, Co | 5×10^6 Torr |
| Microeletronics | Si, Ge, refractory, dielectrics | < 5×10^4 Torr |
| R&D | Si, Al, Ni, Au, etc | 2×10^11 Torr |
Mini Source, 3KW
2cc fixed pocket
Mighty Source, 3KW
2cc x 4 pockets
Fix Pocket, 10KW
2cc x 4 pockets
Rotary Pocket, 10KW
- 7 to 30cc x 4-pocket
- 7 to 12 cc x 6-pocket
- 150cc carousel pocket
Custom assembly
- All integrated
- vertical & horizontal
Linear Source
- No bearing in vacuum
- Bakeable to 220C
- 7 to 40cc x 4-pocket
XL Rotary Pocket
- 100cc x 3-pocket
- 40 to 75 cc x 4-pocket
- 25 to 40 cc x 6-pocket
- 400 cc carousel pocket
Programmable Sweep