Heater Blanket
Chemical resistance, suitable for moisture and abusive environments, rapid heat-up, steady temperature maintenance, uniform heat distribution, and cost effective!
Technology:
- Evenly heat distribution
- Patented Ground heating element
- Built in controlling with adjustable temperature
- Built in High/Low limit alarm thermostat
- Clean room compatible material
- Multi-stand wire
High Temperature System: Custom design to guarantee correct amount of insulation, energy efficient, and touch safe.
Features:
- Temperature range: Up to 300 degree Celsius for class 10 clean room/ Up to 593 degree Celsius for class 100 clean room
- All system components heated and insulated including fittings
- Diameters as small as 1/4″
- Uniform temperature throughout entire wire
- Patented grounded heating element
- Built in contrilling with High/Low limit alarm thermostat
- 120-600 VAC or DC, single or three phase, 50 or 60Hz
Applications: Gas lines, Exhaust lines, Forelines, Abatement, Valve, Tanks, Drums, Vessels, Bake-out, Analytical equipment, Emission testing, Fluid delivery test
High Temperature Systems: Custom pump line heating system to reduce build up of solids in LPCVD, PECVD, and metal etch vacuum piping systems. It helps reduce particle generation and eliminate unscheduled maintenance downtime and improving the consistency of yield.
Features:
- Compliant with global guidelines including UL, CF, NEC, and SEMI-S2-93
- Even heating up to 150 degree Celsius to eliminate cold spots
- System combines both standard and custom lines
- Precision electric temperature controllers and software
- Adjustable temperature
- Reinforced silicone rubber fabric, 1/4″ and 1/2″ thick
- Standard voltage 120 to 208 VAC
- Heaters inter connectable up to 15A circuit
Applications:
LPVCD: Silicone nitride, Titanium nitride
Metal etch: Aluminum , Tungsten, Copper
CVD: Tungsten,
Sample Heater
Features and Benefits:
- UHV compatible
- Oxygen compatible
- RF/DC biasing
- Max. temperature of 950 degree Celsius
- Unprecedented temperature uniformity
Applications:
- Substrate heating (PVD, MOCVD, ECR)
- Laser ablation
- Ion Beam Deposition
- Variable temperature close-loop control
