For more details, please visit: www.meivac.com
Systems and Proces Solutions
- Standard-setting putter systems and processes
- Innovative custom vacuum systems
Process Component
- Proprietary Magnetron Sputter Sources
- Proprietary Substrate Heaters
- Innovative Pressure Control Throttle Valves
Process optimization
- Higher deposition rates
- Film thickness uniformity optimization
- Film stoichiometry uniformity control and repeatability
Process development to address new Applications
- New materials
- New sources and/or process chamber configurations
Process development is not just limited to standard systems. Our Process team works with customers to:
- Help optimize processes on their existing tools
- Design new tools that can meet their emerging requirements
We will work with your researchers and engineers to maximize the process performance of a new or existing tool.
Evaporation Source
