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4841 Davenport Place, Fremont, CA 94538

Manual Shutter

Viewport can become contaminated from the coating material. Shutter is used to prevent deposition onto the viewport, thus preserve the quality of viewport.

Material304
Max. Bake temperature250° C
Operating temperature120° C to 150° C
Pressure range1×10^11 Torr
P/NFlange A (inch)A (mm)B (inch)B (mm)
STR-CF2.75CF2.755.981522.7269
STR-CF4.5CF4.57.761974.49114
STR-CF6.0CF6.09.252355.98152
STR-CF8.0CF8.011.222857.95202

Pneumatic Shutter

Adjustable stopYes
Flow regulatorStandard
Solenoid operated100 psi max
Bake Temperature150° C