PVD, Multi-chamber System
- Modular design to suit a variety of applications
- R&D or small batch production, up to three process chambers
- Load lock for substrates up to 200mm
- Integrated computer control with recipe, tolerance checking, and data logging
- Rotating substrate can be heated, cooled, or biased
- Ion source pre-clean for assisted deposition
- Crystal monitoring or Optical monitoring
PVD, All-In-One
- Combination Sputter/ Evaporation
- Industry’s first cost effective “Open Platform” design
- For R&D and small production
- Uses Confocal technique
Confocal sputtering is the technique of arranging magnetrons within a vacuum chamber in such a way that multiple materials can be applied onto the substrate without breaking vacuum. Confocal sputtering also allows the user to co-sputter, or to create a film of two or more materials at once. This method is popular for research and development tools and for small scale batch productions.
Features and Benefits:
- Graphic user interface, recipe, data logging, and remote diagnostics
- In-Situ monitoring (RGA, Crystal, and Optical monitoring)
- Single, multiple, or planetary substrate fixture
- Rotating substrate can be heated, cooled, or biased
- Ion source pre-clean or assisted deposition
- Load lock or glove box integration
- Uses Confocal technique allows serial or co-sputtering
- Unlike conventional methods, smaller targets can be used for same uniformity or deposit rate
- Up to 4 magnetron can be used
PVD, Linear Magnetron
Designed for high throughput production
- Encapsulated NdFeB rare earth magnets and water flow
- DC, RF magnetron and microwave power compatability
- Movable trolley carries 12″x12″ substrate holder
- Samples loading concurrent with processing
- Linear cathodes are available in target width from 1.5″ to 10″ and length up to 8′
Target Material
We supply the most commonly requested target shapes: round, rectangular, ring, ConMag, Quantum, S-Gun, as well as more conventional sizes. If you do not find the shape you need, we can custom a sputter target for you with any materials and purities we carry.