Rotary FT has 5 variations of design; each for a specific requirement. See below table.
Housing are made of Aluminum, except Hi Temp series which are all SST. All rotary FT comes standard with a scale. “Economy Series” is a low cost version which does not have a scale. “Precision Series” is equipped with a precision micrometer.
Torque of Heavy Duty series can be as high as 240 in-lb.
Rotary FT : VFR
Specification
Economy
Standard
Hi Temp
Hy Duty
Precision
Bake temp (C )
200
200
315
200
200
Op. temp (C )
-20 to 150
-20 to 150
-20 to 315
-20 to 150
-20 to 150
scale resol
5 deg
5 deg
5 deg
5 deg
2 deg
Max Torque
125 in-oz
125 in-oz
125 in-oz
5 ft-lb
320 in-oz
Flange
CF133/275
CF133/275
CF133/275
CF275
CF275
Flange
KF16/40
KF16/40
—
KF40
KF40
Leak rate
1×10-9 standard cc/s
Actuator
Manual
Pneumatic
Electric
Magnetic Coupled
Please submit inquiry. Drawings and specification available upon request.
“Economy”: VFR-E
Scale resolution: 5°
Standard: VFR-S
High Temp. : VFR-HT
Identical dimension as Standard (VFR-S) except equipped with all stainless steel body and housing.
Precision: VFR-P
Resolution: 2°
Heavy Duty: VFR-HD
0.375 diameter shaft
Manual or motorized
Resolution: 2°
Magnetic Feedthrough
Miniature magnetic ally coupled rotary feedthrough is UHV compatible. It is the most economical FT of all . The trade off is not suitable for fast recipricating application.
