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4841 Davenport Place, Fremont, CA 94538

EV-A Series

The EV-A Series is a family of air-cooled, dry pumps that have industry-leading specifications.  The family consists of the EV-A3 (9 cfm), the EV-A6 (21.6 cfm), and the EV-A10 (36 cfm) pumps.  Typical applications include Load Locks, PVD Systems, Analytical instruments and Electron Microscopes.  These pumps are ideal for replacing wet pumps as well as Scroll type dry vacuum pumps.

Features and Benefit:

  • Small Air-Cooling Pump
  • No-Contact Design
  • High Pumping Speeds at Atmosphere
  • Highest Water Vapor Pumping of Any Air-Cooled Dry Pump
  • UL, CE, and NRTL rated
  • Single- and Three-Phase Versions Available

Applications

  • Load Locks
  • Analytical Instruments (LCMS, ICPMS)
  • Electron Microscopes
  • PVD Systems
  • Oxygen Plasma Systems

Model EV-A03

EV-A03

The Model EV-A03 air cooled dry pump offers high pumping speed (9 cfm) and high water vapor pumping (250 g/hr) when used with the optional gas ballast valve.

The pump is available with optional casters/levelers.

Specifications

pumping speed
L/min
Max
250
Atmospheric Open150
Ultimate Pressure
Pa
Gas Ballast: off1
Gas Ballast: On10
Max. Inlet PressureAtmospheric Pressure
Max. Water Vapor Pumping Rate (at Gas Ballast On), g/hr250
ConnectionGas InletNW25
Gas OutletNW25
Approx. Power at Ultimate Pressure
(kw)
0.34
Weightkg23
lbs51
Power Supply1 phase
100V model
1 phase
100-150V
50/60Hz
1 phase
200V model
1 phase
200-240V
50/60Hz
3 phase
200V model
3 phase
200-240V
50/60Hz

Model EV-A06

EV-A06

The Model EV-A06 air cooled dry pump offers high pumping speed (21.6 cfm) and high water vapor pumping (350 g/hr) when used with the optional gas ballast valve. The pump is available with optional casters/levelers.

Specifications

pumping speed
L/min
Max
600
Atmospheric Open480
Ultimate Pressure
Pa
Gas Ballast: off1
Gas Ballast: On10
Max. Inlet PressureAtmospheric Pressure
Max. Water Vapor Pumping Rate (at Gas Ballast On), g/hr350
ConnectionGas InletNW40
Gas OutletNW25
Approx. Power at Ultimate Pressure
(kw)
0.59
Weightkg54
lbs119
Power Supply1 phase
100V model
1 phase
100-150V
50/60Hz
1 phase
200V model
1 phase
200-240V
50/60Hz
3 phase
200V model
3 phase
200-240V
50/60Hz

Model EV-A10

EV-A10

The Model EV-A10 air cooled dry pump offers industry leading specifications in an air cooled dry pump. The pump comes standard with four lockable casters/levelers.

Specifications

pumping speed
L/min
Max
1000
Atmospheric Open800
Ultimate Pressure
Pa
Gas Ballast: off1
Gas Ballast: On2
Max. Inlet PressureAtmospheric Pressure
Max. Water Vapor Pumping Rate (at Gas Ballast On), g/hr500
ConnectionGas InletNW40
Gas OutletNW25
Approx. Power at Ultimate Pressure
(kw)
1.1
Weightkg72
lbs159
Power Supply1 phase
100V model
N/A
1 phase
200V model
1 phase
200-240V
50/60Hz
3 phase
200V model
3 phase
200-240V
50/60Hz